Product appearance varies by configuration.
Fluid Control Solutions (FCS)
QT-COMP Integrated Gas Control System
QT-COMP is a compact, tubeless gas control system for OEMs and system integrators. Flow and pressure modules can be combined with valves, filters, and mixing chambers on a modular manifold. Configurations with 3 to 9 channels are available. Factory assembly and testing simplify commissioning, while top-access modules support maintenance in space-constrained equipment.
- Flow Range
- 0.06~3 mln/min to 1~50 Ln/min (N₂ equivalent)
- Accuracy (Flow)
- ±0.5%Rd ±0.1%FS (standard); ±1%FS for low ranges
- Pressure Range
- 2~100 mbar to 0.2~10 bar (abs/gauge)
- Accuracy (Pressure)
- ±0.5%FS
Configuration and suitability confirmed for your application.
Core Performance
| Flow Range | 0.06~3 mln/min to 1~50 Ln/min (N₂ equivalent), higher ranges customizable |
| Flow Accuracy | ±0.5% Rd ±0.1% FS (standard); ±1% FS for ranges ≤3.5 mln/min |
| Turndown Ratio | 1:50 (up to 1:187.5 in digital mode) |
| Repeatability | <0.1%FS; <0.2%Rd |
| Settling Time | ≤1.2s (typical above 5%FS) |
| Control Stability | < ±0.1%FS (typical for 1 Ln/min N₂) |
| Sensor Response | <0.1s |
| Zero T-coefficient | <0.05%FS/°C |
| Span T-coefficient | <0.05%Rd/°C |
| Pressure Sensitivity | 0.1%Rd/bar typical (N₂) |
| Warm-up Time | 2 min for ±2%FS; 30 min for optimum accuracy |
Pressure Module
| Pressure Sensor Range | 2~100 mbar to 0.2~10 bar (abs or gauge selectable) |
| Pressure Control Range | 5~100 mbar to 0.5~10 bar (electronic pressure controller) |
| Pressure Accuracy | ±0.5%FS |
Mechanical & Electrical
| Max. Operating Pressure | 10 bar (gauge) |
| Operating Temperature | -10°C ~ +50°C |
| Channel Configuration | 3~9 channels, expandable |
| Manifold Material | Anodized aluminum; 316L stainless steel (optional) |
| Wetted Parts | 316L stainless steel |
| Seal Material | EPDM standard; Viton/Kalrez (FFKM) optional |
| Filter Module | Sintered SS filter, 0.5/2/7/15 µm selectable |
| Valve Types | Normally closed/open control valves; solenoid shut-off/3-way valves |
| Valve Kv Value | Max Kv=1.0 |
| Valve Max Temp | 50°C |
| Power Supply | 15~24 Vdc |
| Power (Controller) | Max 320 mA |
| Power (Meter) | ~70 mA |
| Solenoid Power | 3W |
| Analog Output | 0-10Vdc (load>2kΩ); 0-20mA/4-20mA (load<375Ω) |
| Analog Setpoint | 0(4)-20mA; 0-(5)10Vdc |
| Digital Comm. | RS232/RS485, Modbus RTU/TCP, DeviceNet, PROFIBUS DP, PROFINET, EtherCAT, FLOW-BUS |
| Electrical Conn. | Analog/RS232/PROFIBUS: 9-pin male D-sub; DeviceNet: 5-pin male M12; Modbus/EtherCAT/PROFINET: RJ45 |
| Mounting | Bottom mounting holes for panel/bracket; any orientation |
| Protection | IP40 |
| Cleanroom Assembly | Available on request |
Measurement conditions & notes
- QT-COMP employs tubeless surface-mount technology, integrating all functional modules on a unified manifold, significantly reducing leak risks and installation space compared to traditional tubing connections.
- Combine mass flow meters/controllers, pressure sensors/controllers, filters, mixing chambers, shut-off valves, and 3-way valves as needed.
- Bottom connection design allows easy top-access maintenance and module replacement without disconnecting bottom plumbing.
- Fully factory tested and calibrated for "plug-and-play" installation, dramatically reducing on-site commissioning time and cost.
- Supports multiple industrial communication protocols for seamless integration with PLC/DCS/DCIM supervisory systems.
- Face seal fittings, compression fittings or flanges can be configured to meet various industry requirements.
- Typical applications: semiconductor CVD/etching, analytical instrument carrier gas control, bioreactor gas mixing, chemical process control, vacuum/plasma/sputter coating, combustion control, catalyst evaluation, etc.
Confirm fluid compatibility, materials, connections, and available configuration with our team before ordering.
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