MFC / GAS FLOW
Product appearance varies by configuration.
Mass Flow Controller (MFC)
KC200 Series
The KC200 Series mass flow controller is designed for equipment integration in semiconductor manufacturing, photovoltaic production, and vacuum coating. EtherCAT and RS-485 versions are available. See the model specifications for wetted materials, seal options, and gas compatibility.
- Range
- 0~10 sccm to 0~400 slm (nitrogen equivalent)
- Accuracy
- ±0.3%F.S. (≤30%F.S.) / ±1.0%S.P. (>30%F.S.)
- Turndown Ratio
- 50:1
- Response Time
- Controller ≤1s / Meter ≤10ms
Configuration and suitability confirmed for your application.
Basic Parameters
| Media Requirement | Clean, dry gas |
| Media Type | Air, nitrogen, oxygen, carbon dioxide, hydrogen, methane, ammonia, silane, boron trichloride, chlorine, etc. |
| Flow Range¹ (Nitrogen Equivalent) | (0~10, 20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10, 20, 50) slm (0~100, 200, 400) slm ——Ranges ≥100 slm use external valve structure ——Other ranges available, please contact us |
| Accuracy | ±0.3%F.S.² (≤30%F.S.) ——%F.S. means error as percentage of full scale ±1.0%S.P.³ (>30%F.S.) ——%S.P. means error as percentage of setpoint |
| Turndown Ratio | 50:1 |
| Response Time⁴ | Controller: ≤1s Meter: ≤10ms ——Response time refers to time to reach ±2% of setpoint or final stable value |
| Repeatability | ≤±0.2%F.S. |
| Resolution | 0.01 sccm, ≤100 sccm 1 sccm, >100 sccm |
| Leak Rate | FKM seal: ≤4×10⁻¹⁰ Pam³/sHe All-metal seal: ≤1×10⁻¹² Pam³/sHe ——All-metal seal version not available for ranges ≥100 slm |
| Max Pressure Rating | 10bar |
Environmental Conditions
| Operating Temperature | 0~50℃ |
| Operating Humidity | 10%~90% R.H. (no condensation) |
| Working Pressure⁵ | Controller: max 6 bar (customizable) Meter: 10 bar ——Working pressure refers to differential pressure between inlet and outlet |
| Storage Temperature | -20~85℃ |
Electrical Parameters
| Power Supply | DC24V |
| Power Consumption | ≤2.7W |
| Startup Time | ≤1s |
Communication Interface
| EtherCAT Version | RJ45 dual port (with LED), device address 1-999 Configurable via host software or command |
| RS485 Version | DB9M interface or RJ45 dual port; Modbus-RTU protocol MKS protocol optional; device address 1-99 Baud rate supports 9600, 19200 (default), 38400, etc. Configurable via DIP switch |
| Analog Signal (RS485 version optional) | 0-5V or 4-20mA (via DB9M interface) |
| Display | EtherCAT version: Yes (located on top) RS485 version: No |
Mechanical Parameters
| Connector Type | Ferrule: 1/4inch, 1/2inch; VCR: 1/4inch, 1/2inch; Others available |
| Wetted Materials | FKM seal: 316L stainless steel, fluororubber, silicon nitride All-metal seal: 316L stainless steel ——All-metal seal version not available for ranges ≥100 slm |
| Body Material | Base: 316L stainless steel Housing: Aluminum alloy |
| Seal Material | FKM fluororubber or all-metal |
| Weight | Controller: 0.85kg~2.8kg Meter: 0.80kg |
Measurement conditions & notes
- Unless otherwise specified, this product is calibrated under the following conditions: nitrogen, 25℃, 2.5 bar differential pressure (inlet 3.5 barA, outlet 1 barA), horizontal position.
- It is recommended to install a straight pipe section of appropriate size at the inlet, otherwise accuracy deviation may occur.
- It is recommended to use the largest possible fittings at the inlet and outlet to avoid additional pressure loss.
- The shown ranges are available for nitrogen.
- %F.S. means error as percentage of full scale.
- %S.P. means error as percentage of setpoint.
- Response time refers to time to reach ±2% of setpoint.
- Working pressure refers to differential pressure between inlet and outlet.
Confirm fluid compatibility, materials, connections, and available configuration with our team before ordering.
